The usual automated interferometric profilometers suffer from phase-unwrapping problems. We discuss a one-dimensional method for the absolute determination of the path difference in interferometers to obtain unique surface profiles with high accuracy.
© 1994 Optical Society of America
Original Manuscript: February 14, 1994
Published: July 1, 1994
J. Schwider and Liang Zhou, "Dispersive interferometric profilometer," Opt. Lett. 19, 995-997 (1994)