We describe a new optical low-coherence reflectometer for depth and lateral scanning without moving parts. The reflectometer covers a range of 0.4 and 1 mm in the depth and lateral dimensions, respectively. This level was accomplished by an acousto-optic deflector for lateral scanning and temporal-coherence gating for depth resolution. The ac component of the reflected light was captured by a cooled 16-bit CCD camera with a special readout scheme. As a proof of principle, optical depths of a staggered stack of glass plates were measured.
© 1994 Optical Society of America
Original Manuscript: September 8, 1993
Published: February 15, 1994
A. Knüttel, J. M. Schmitt, and J. R. Knutson, "Low-coherence reflectometry for stationary lateral and depth profiling with acousto-optic deflectors and a CCD camera," Opt. Lett. 19, 302-304 (1994)