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Broadband multilayer antireflection coating for semiconductor laser facets

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Abstract

Using a triple-layer antireflection coating of Al2O3, Si, and SiO2, we have achieved a minimum facet reflectivity of 1 × 10−6 and a bandwidth of 90 nm for a reflectivity of 5 × 10−5 or less for 1550-nm center-wavelength InGaAsP semiconductor lasers. A facet reflectivity of 3 × 10−6 and a bandwidth of 30 nm for a reflectivity of 5 × 10−5 were achieved for 1310-nm InGaAsP lasers. This coating is applicable to broadband external-cavity-tuned laser sources, edge-emitting light-emitting diodes, and semiconductor laser amplifiers.

© 1995 Optical Society of America

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