OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 20, Iss. 10 — May. 15, 1995
  • pp: 1216–1218

Crystallographically limited submicrometer gratings in (100) and (211) silicon

J. Sarathy, D. C. Diaz, and J. C. Campbell  »View Author Affiliations


Optics Letters, Vol. 20, Issue 10, pp. 1216-1218 (1995)
http://dx.doi.org/10.1364/OL.20.001216


View Full Text Article

Enhanced HTML    Acrobat PDF (350 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We demonstrate the fabrication of submicrometer gratings in (100) and (211) Si with periodicities that are appropriate for normal-incidence coupling into Ge–Si waveguides. Gratings of periodicities in the 0.25–0.75μm range were fabricated by a standard holographic lithography technique. Crystallographically preferential wet etching that effectively terminates at the {111} family of planes facilitates the fabrication of symmetric gratings in (100) Si and of blazed gratings in (211) Si. The gratings used in this study are appropriate for the fabrication of integrated first-and second-order, normal-incidence grating couplers at a 1.30-μm wavelength. The blazed gratings show a preferential coupling of more than 80% of the total diffraction into the (+1) diffraction order at normal incidence. The maximum first-order diffraction efficiency obtained with these gratings was approximately 28% in (100) Si and 23% in (211) Si.

© 1995 Optical Society of America

History
Original Manuscript: January 31, 1995
Published: May 15, 1995

Citation
J. Sarathy, D. C. Diaz, and J. C. Campbell, "Crystallographically limited submicrometer gratings in (100) and (211) silicon," Opt. Lett. 20, 1216-1218 (1995)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-20-10-1216


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. Y. Shani, C. H. Henry, R. C. Kistler, R. F. Kazarinov, K. J. Orlowsky, IEEE J. Quantum Electron. 27, 556 (1991). [CrossRef]
  2. C. H. Henry, G. E. Blonder, R. F. Kazarinov, J. Lightwave Technol. 7, 1530 (1989). [CrossRef]
  3. K.-H. Li, D. C. Diaz, Y. He, J. C. Campbell, C. Tsai, Appl. Phys. Lett. 64, 2394 (1994). [CrossRef]
  4. P. Steiner, F. Kozlowski, W. D. Lang, Appl. Phys. Lett. 62, 2700 (1993). [CrossRef]
  5. Q. Mi, X. Xiao, J. C. Sturm, L. C. Lenchyshyn, M. L. W. Thewalt, Appl. Phys. Lett. 60, 3177 (1992). [CrossRef]
  6. S. S. Murtaza, R. Qian, D. Kinosky, R. Mayer, A. F. Tasch, S. Banerjee, J. C. Campbell, Appl. Phys. Lett. 62, 1976 (1993). [CrossRef]
  7. R. Adar, C. H. Henry, R. C. Kistler, R. F. Kazarinov, Appl. Phys. Lett. 60, 1779 (1992). [CrossRef]
  8. Y. M. Liu, P. R. Prucnal, Electron. Lett. 28, 1434 (1992). [CrossRef]
  9. J. Sarathy, R. A. Mayer, K. Jung, S. Unnikrishnan, D.-L. Kwong, J. C. Campbell, Opt. Lett. 19, 798 (1994). [CrossRef] [PubMed]
  10. W. T. Tsang, S. Wang, J. Appl. Phys. 46, 2163 (1975). [CrossRef]
  11. G. A. C. M. Spierings, J. F. C. Verhoeven, H. Den Biggelaar, T. G. Gijsbers, Philips J. Res. 44, 407 (1989).
  12. D. L. Kendall, Ann. Rev. Mater. Sci. 9, 373 (1979). [CrossRef]
  13. K. E. Bean, IEEE Trans. Electron. Dev. ED-25, 1185 (1978). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited