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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 20, Iss. 12 — Jun. 15, 1995
  • pp: 1441–1443

High-efficiency subwavelength diffractive optical element in GaAs for 975 nm

M. E. Warren, R. E. Smith, G. A. Vawter, and J. R. Wendt  »View Author Affiliations


Optics Letters, Vol. 20, Issue 12, pp. 1441-1443 (1995)
http://dx.doi.org/10.1364/OL.20.001441


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Abstract

We have fabricated subwavelength diffractive optical elements with binary phase profiles for operation at 975 nm. The individual surface-relief features of the elements are smaller than the wavelength of light in the material. By modulating the size and spacing of the features we form artificial, gradient, effective index-of refraction surfaces. The blazed transmission gratings were designed with rigorous coupled-wave analysis and fabricated by direct-write electron-beam lithography and reactive ion-beam etching in GaAs. The gratings have minimum features 63 nm wide. Transmission measurements show 85% diffraction efficiency into the first order.

© 1995 Optical Society of America

History
Original Manuscript: February 27, 1995
Published: June 15, 1995

Citation
M. E. Warren, R. E. Smith, G. A. Vawter, and J. R. Wendt, "High-efficiency subwavelength diffractive optical element in GaAs for 975 nm," Opt. Lett. 20, 1441-1443 (1995)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-20-12-1441

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