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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 20, Iss. 18 — Sep. 15, 1995
  • pp: 1841–1843

Depth of focus and the moment expansion

Yao-Ting Wang, Y. C. Pati, and Thomas Kailath  »View Author Affiliations


Optics Letters, Vol. 20, Issue 18, pp. 1841-1843 (1995)
http://dx.doi.org/10.1364/OL.20.001841


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Abstract

We introduce the so-called moment expansion of a defocused image as a tool for analyzing and improving the depth of focus in optical imaging. It is shown that a number of previously noted defocus phenomena can be readily derived or explained in terms of moment expansion. Some potential applications of the moment expansion to phase-shifting mask and pupil filter design for optical lithography are also briefly noted.

© 1995 Optical Society of America

History
Original Manuscript: May 15, 1995
Published: September 15, 1995

Citation
Yao-Ting Wang, Y. C. Pati, and Thomas Kailath, "Depth of focus and the moment expansion," Opt. Lett. 20, 1841-1843 (1995)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-20-18-1841

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