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Optics Letters

Optics Letters


  • Vol. 20, Iss. 21 — Nov. 1, 1995
  • pp: 2201–2203

Thin-film waveguides of zirconium oxyfluoride with variable refractive index produced by ion-beam-assisted deposition

U. J. Gibson and K. D. Cornett  »View Author Affiliations

Optics Letters, Vol. 20, Issue 21, pp. 2201-2203 (1995)

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We describe the formation of ZrOxFy optical waveguides by oxygen ion-beam-assisted deposition of ZrF4 films. Waveguide losses less than 1 dB/cm for the TE0 mode at 514 nm resulted from bombardment with 600-eV O 2 + ions, and the waveguide index was a function of bombarding current at this energy, with a maximum change of Δn = 0.28. Local bombardment of a waveguide resulted in generation of an integrated planar lens compatible with holographic fabrication. The process is also suitable for the formation of graded-index waveguides.

© 1995 Optical Society of America

Original Manuscript: July 3, 1995
Published: November 1, 1995

U. J. Gibson and K. D. Cornett, "Thin-film waveguides of zirconium oxyfluoride with variable refractive index produced by ion-beam-assisted deposition," Opt. Lett. 20, 2201-2203 (1995)

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