OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 20, Iss. 21 — Nov. 1, 1995
  • pp: 2201–2203

Thin-film waveguides of zirconium oxyfluoride with variable refractive index produced by ion-beam-assisted deposition

U. J. Gibson and K. D. Cornett  »View Author Affiliations


Optics Letters, Vol. 20, Issue 21, pp. 2201-2203 (1995)
http://dx.doi.org/10.1364/OL.20.002201


View Full Text Article

Enhanced HTML    Acrobat PDF (274 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We describe the formation of ZrOxFy optical waveguides by oxygen ion-beam-assisted deposition of ZrF4 films. Waveguide losses less than 1 dB/cm for the TE0 mode at 514 nm resulted from bombardment with 600-eV O 2 + ions, and the waveguide index was a function of bombarding current at this energy, with a maximum change of Δn = 0.28. Local bombardment of a waveguide resulted in generation of an integrated planar lens compatible with holographic fabrication. The process is also suitable for the formation of graded-index waveguides.

© 1995 Optical Society of America

History
Original Manuscript: July 3, 1995
Published: November 1, 1995

Citation
U. J. Gibson and K. D. Cornett, "Thin-film waveguides of zirconium oxyfluoride with variable refractive index produced by ion-beam-assisted deposition," Opt. Lett. 20, 2201-2203 (1995)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-20-21-2201


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. N. Nishihara, M. Haruna, T. Suhara, Optical Integrated Circuits (McGraw-Hill, New York, 1989).
  2. T. Tamir, ed., Integrated Optics, 2nd ed. (Springer-Verlag, Berlin, 1979).
  3. D. B. Anderson, R. L. Davis, J. T. Boyd, R. R. August, IEEE J. Quantum Electron. QE-13, 275 (1977). [CrossRef]
  4. M. M. Minot, C. C. Lee, J. Lightwave Technol. 8, 1856 (1990). [CrossRef]
  5. R. T. Chen, Appl. Phys. Lett. 62, 2495 (1993). [CrossRef]
  6. J. Sochacki, J. Mod. Opt. 35, 891 (1988). [CrossRef]
  7. G. N. Lawrence, Applied Optics Research, 4455 N. Osage Road, Tucson, Ariz. 85718 (personal communication, 1989).
  8. M. Kobayashi, H. Terui, Appl. Opt. 22, 3121 (1983). [CrossRef] [PubMed]
  9. C. K. Hwangbo, L. J. Lingg, J. P. Lehan, H. A. MacLeod, F. Suits, Appl. Opt. 28, 2779 (1989). [CrossRef] [PubMed]
  10. L. N. Binh, R. P. Netterfield, P. J. Martin, Appl. Surf. Sci. 22/23, 656 (1985). [CrossRef]
  11. U. J. Gibson, Proc. Mater. Res. Soc. Symp. 223, 263 (1991).
  12. M. D. Himel, “Microstructure effects on light propagation in zinc sulfide thin film waveguides,” Ph.D. dissertation (University of Arizona, Tucson, Ariz., 1988), p. 72.
  13. J. C. Manifacier, J. Gasoit, J. P. Fillard, J. Phys. E 9, 1002 (1976). [CrossRef]
  14. M. D. Himel, U. J. Gibson, Appl. Opt. 25, 4413 (1986). [CrossRef] [PubMed]
  15. U. J. Gibson, K. D. Cornett, “Ion-beam-assisted deposition of zirconium oxyfluoride thin films with varying composition and refractive index,” to be submitted toJ. Vac. Sci. Technol.
  16. R. T. Chen, Proc. Soc. Photo-Opt. Instrum. Eng. 1374, 162 (1990).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4 Fig. 5
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited