We describe the formation of
waveguides by oxygen ion-beam-assisted deposition of ZrF4 films.
Waveguide losses less than 1 dB/cm for the TE0 mode at 514 nm
resulted from bombardment with 600-eV
© 1995 Optical Society of America
Original Manuscript: July 3, 1995
Published: November 1, 1995
U. J. Gibson and K. D. Cornett, "Thin-film waveguides of zirconium oxyfluoride with variable refractive index produced by ion-beam-assisted deposition," Opt. Lett. 20, 2201-2203 (1995)