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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 20, Iss. 24 — Dec. 15, 1995
  • pp: 2451–2453

Schwarzschild soft-x-ray microscope for imaging of nonradiating objects

I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Yu. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin  »View Author Affiliations


Optics Letters, Vol. 20, Issue 24, pp. 2451-2453 (1995)
http://dx.doi.org/10.1364/OL.20.002451


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Abstract

A soft-x-ray optical system based on multilayer mirrors was designed and fabricated for the production of magnified images of micro-objects with a spatial resolution of ~0.2 μm at a wavelength λ ≈ 20 nm. The system consists of a laser-produced plasma source, a condenser mirror, a 20× Schwarzschild objective, a filter set, and a detector. The quality of the x-ray optics and the precision of the system adjustment enabled us to achieve, for the first time to our knowledge, ~0.2-μm resolution using the full aperture (numerical aperture 0.2) of the objective and a single shot of a frequency-doubled Nd laser (pulse energy ~0.5 J, pulse duration ~1.5 ns).

© 1995 Optical Society of America

History
Original Manuscript: July 13, 1995
Published: December 15, 1995

Citation
I. A. Artioukov, V. E. Asadchikov, Yu. S. Kas’yanov, A. I. Fedorenko, V. V. Kondratenko, R. V. Serov, A. V. Vinogradov, and S. A. Yulin, "Schwarzschild soft-x-ray microscope for imaging of nonradiating objects," Opt. Lett. 20, 2451-2453 (1995)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-20-24-2451

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