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Optics Letters

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  • Vol. 20, Iss. 3 — Feb. 1, 1995
  • pp: 243–245

Multiphoton micrometer-scale photoetching in silicate-based glasses

E. Sauvain, Jae H. Kyung, and N. M. Lawandy  »View Author Affiliations


Optics Letters, Vol. 20, Issue 3, pp. 243-245 (1995)
http://dx.doi.org/10.1364/OL.20.000243


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Abstract

Silicate-based glasses containing approximately 10% by weight boron or more have been observed to exhibit selective etching in hydrofluoric acid solution after direct exposure to intense visible laser light at 532 nm. The observation of a ring-shaped etch pattern in samples exposed to solid Gaussian beams suggests that selective etching is related to a charge-diffusion process rather than to local light-induced defect generation. The technique has so far resulted in the maskless production of micrometer-scale features with submicrometer depths.

© 1995 Optical Society of America

History
Original Manuscript: October 27, 1994
Published: February 1, 1995

Citation
E. Sauvain, Jae H. Kyung, and N. M. Lawandy, "Multiphoton micrometer-scale photoetching in silicate-based glasses," Opt. Lett. 20, 243-245 (1995)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-20-3-243


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References

  1. Foturan, intricate-shaped glass and glass–ceramic components, product information no. 4844/2e (Schott Corporation Technical Glass Division, Yonkers, N.Y.).
  2. G. Battaglin, A. Boscolo-Boscoletto, F. Caccavale, G. De Marchi, P. Mazzoldi, G. W. Arnold, in Modifications Induced by Irradiation of Glasses, P. Mazzoldi, ed. (Elsevier, New York, 1992), p. 91.
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  8. M. J. Weber, ed., CRC Handbook of Laser Science and Technology (CRC, Boca Raton, Fla., 1986), Vol. III, Part I, Sec. 1.2, p. 243.

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