Compact in-line interferometer for low-coherence reflectometry
Optics Letters, Vol. 20, Issue 4, pp. 419-421 (1995)
http://dx.doi.org/10.1364/OL.20.000419
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Abstract
An interferometer with an efficient confocal layout is described. Similar in structure to a folded Linnik microscope, the interferometer employs broadband illumination to improve rejection of out-of-focus light. A prototype reflectometry system based on the new interferometer achieved an axial resolution of less than 10 μm within a probing depth of 1 mm in samples containing particulate scatterers and specularly reflecting objects. Options for mechanical and electronic scanning are discussed.
© 1995 Optical Society of America
Citation
J. M. Schmitt, "Compact in-line interferometer for low-coherence reflectometry," Opt. Lett. 20, 419-421 (1995)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-20-4-419
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