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Optics Letters

Optics Letters


  • Vol. 21, Iss. 10 — May. 15, 1996
  • pp: 764–766

Micromachined scanning confocal optical microscope

D. L. Dickensheets and G. S. Kino  »View Author Affiliations

Optics Letters, Vol. 21, Issue 10, pp. 764-766 (1996)

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We have constructed a miniature confocal optical microscope for monochromatic imaging that uses single-mode fiber illumination and a two-phase off-axis zone plate objective lens. The scanning mechanism consists of two micromachined silicon torsional scanning mirrors with orthogonal axes of rotation. The objective lens is made of fused silica and has a N.A. of 0.24 at λ = 0.6328 μm, with a 1.0-mm working distance. The device is side looking, with die dimensions of 1.2 mm × 2.5 mm × 6.5 mm. We have measured 1.0-μm resolution over a 100-μm field of view.

© 1996 Optical Society of America

Original Manuscript: January 16, 1996
Published: May 15, 1996

D. L. Dickensheets and G. S. Kino, "Micromachined scanning confocal optical microscope," Opt. Lett. 21, 764-766 (1996)

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  1. H. K. Seidlitz, M. Classen, Endoscopy 24, 225 (1992). [CrossRef] [PubMed]
  2. K. P. Ghiggino, M. R. Harris, P. G. Spizzirri, Rev. Sci. Instrum. 63, 2999 (1992). [CrossRef]
  3. R. Juškaitis, T. Wilson, Opt. Commun. 92, 315 (1992). [CrossRef]
  4. D. L. Dickensheets, G. S. Kino, Proc. SPIE 2184, 39 (1994). [CrossRef]
  5. L. Giniunas, R. Juškaitis, S. V. Shatalin, Electron. Lett. 27, 724 (1991). [CrossRef]
  6. T. Dabbs, M. Glass, Appl. Opt. 31, 3030 (1992). [CrossRef] [PubMed]
  7. L. Giniunas, R. Juškaitis, S. V. Shatalin, Appl. Opt. 32, 2888 (1993). [CrossRef] [PubMed]
  8. S. Sinzinger, J. Jahns, presented at the OSA Annual Meeting, Portland, Ore., September 10–15 1995.
  9. S. Sheard, T. Suhara, H. Nishihara, J. Lightwave Technol. 11, 1400 (1993). [CrossRef]
  10. B. R. Hopkins, Design Analysis of Shafts and Beams, 2nd ed. (Krieger, Malabar, Fla., 1987), p. 365.

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