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Optics Letters

Optics Letters


  • Vol. 21, Iss. 13 — Jul. 1, 1996
  • pp: 946–948

Pulsed-laser deposition and optical properties of completely (001) textured optical waveguiding LiNbO3 films upon SiO2/Si substrates

W. S. Hu, Z. G. Liu, Y-Q. Lu, S. N. Zhu, and D. Feng  »View Author Affiliations

Optics Letters, Vol. 21, Issue 13, pp. 946-948 (1996)

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Completely (001) textured LiNbO3 films have been fabricated upon thermally oxidized SiO2/Si substrates by in situ application of a low electric field in a pulsed-laser deposition system. The biased voltage was 70–75 V on parallel electrodes separated by 7.0 mm. Li-enriched crystal and ceramic targets were used. The achieved films were nearly stoichiometric and have smooth surfaces. Waveguiding performance of the films was demonstrated by a prism-coupling method. The refractive indices were calculated on the basis of isotropic and anisotropic waveguide theories. A low-light propagation loss of 1.9 dB/cm in the films was achieved. It is expected that the films can be used in integrated-optical devices that require d33, γ33, 33, and n33 elements.

© 1996 Optical Society of America

Original Manuscript: January 2, 1996
Published: July 1, 1996

W. S. Hu, Z. G. Liu, Y-Q. Lu, S. N. Zhu, and D. Feng, "Pulsed-laser deposition and optical properties of completely (001) textured optical waveguiding LiNbO3 films upon SiO2/Si substrates," Opt. Lett. 21, 946-948 (1996)

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