Angle-resolved polarimetric phase measurement for the characterization of gratings
Optics Letters, Vol. 21, Issue 20, pp. 1619-1621 (1996)
http://dx.doi.org/10.1364/OL.21.001619
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Abstract
A goniometric ellipsometer is used to recover the optogeometrical parameters of metallic gratings. The phase difference between TE and TM polarizations in all the diffracted orders is measured as a function of the incidence angle. The groove depth, together with the refractive indices of all the media of the diffracting structure, is determined for a holographic sinusoidal aluminum grating. It is shown that a thin layer of alumina on top of the grating must be considered.
© 1996 Optical Society of America
Citation
H. Giovannini, C. Deumié, H. Akhouayri, and C. Amra, "Angle-resolved polarimetric phase measurement for the characterization of gratings," Opt. Lett. 21, 1619-1621 (1996)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-21-20-1619
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