Simultaneous measurement of thicknesses and refractive indices of multiple layers by a low-coherence confocal interference microscope
Optics Letters, Vol. 21, Issue 23, pp. 1942-1944 (1996)
http://dx.doi.org/10.1364/OL.21.001942
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Abstract
We propose a novel technique for simultaneous measurement of layer thicknesses and refractive indices of multiple layers. It is based on a combination of a confocal microscope and low-coherence interferometry. We derived an expression for the geometrical thickness and the refractive index of each layer from both tracing of a marginal ray accepted by a microscope objective and optical path matching conditions. Experimental verification of this method is illustrated by several samples that have a maximum of 13 layers. The geometrical thicknesses and refractive indices thus derived agreed well with those measured by a micrometer or cited from the literature.
© 1996 Optical Society of America
Citation
Takashi Fukano and Ichirou Yamaguchi, "Simultaneous measurement of thicknesses and refractive indices of multiple layers by a low-coherence confocal interference microscope," Opt. Lett. 21, 1942-1944 (1996)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-21-23-1942
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