OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 21, Iss. 23 — Dec. 1, 1996
  • pp: 1942–1944

Simultaneous measurement of thicknesses and refractive indices of multiple layers by a low-coherence confocal interference microscope

Takashi Fukano and Ichirou Yamaguchi  »View Author Affiliations


Optics Letters, Vol. 21, Issue 23, pp. 1942-1944 (1996)
http://dx.doi.org/10.1364/OL.21.001942


View Full Text Article

Enhanced HTML    Acrobat PDF (509 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We propose a novel technique for simultaneous measurement of layer thicknesses and refractive indices of multiple layers. It is based on a combination of a confocal microscope and low-coherence interferometry. We derived an expression for the geometrical thickness and the refractive index of each layer from both tracing of a marginal ray accepted by a microscope objective and optical path matching conditions. Experimental verification of this method is illustrated by several samples that have a maximum of 13 layers. The geometrical thicknesses and refractive indices thus derived agreed well with those measured by a micrometer or cited from the literature.

© 1996 Optical Society of America

History
Original Manuscript: June 11, 1996
Published: December 1, 1996

Citation
Takashi Fukano and Ichirou Yamaguchi, "Simultaneous measurement of thicknesses and refractive indices of multiple layers by a low-coherence confocal interference microscope," Opt. Lett. 21, 1942-1944 (1996)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-21-23-1942


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. P. A. Flournoy, R. W. McClure, G. Wyntjes, Appl. Opt. 11, 1907 (1972).
  2. T. Tsuruta, Y. Ichihara, presented at the International Commission for Optics Conference, Tokyo, August 1974.
  3. R. C. Youngquist, S. Carr, D. E. N. Davies, Opt. Lett. 12, 158 (1987). [CrossRef] [PubMed]
  4. B. L. Danielson, C. Y. Boisrobert, Appl. Opt. 30, 2975 (1991). [CrossRef] [PubMed]
  5. D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, Science 254, 1178 (1991). [CrossRef] [PubMed]
  6. C. K. Hitzenberger, Appl. Opt. 31, 6637 (1992). [CrossRef] [PubMed]
  7. E. A. Swanson, D. Huang, M. R. Hee, J. G. Fujimoto, C. P. Lin, C. A. Puliafito, Opt. Lett. 17, 151 (1992). [CrossRef] [PubMed]
  8. M. J. Yadlowsky, J. M. Schmitt, R. F. Bonner, Appl. Opt. 34, 5699 (1995). [CrossRef] [PubMed]
  9. G. J. Tearney, M. E. Brezinski, J. F. Southern, B. E. Bouma, M. R. Hee, J. G. Fujimoto, Opt. Lett. 20, 2258 (1995). [CrossRef] [PubMed]
  10. C. J. R. Sheppard, T. J. Connolly, J. Lee, C. J. Cogswell, Appl. Opt. 33, 631 (1994). [CrossRef] [PubMed]
  11. T. Fukano, I. Yamaguchi, presented at the 15th Meeting on Lightwave Sensing Technology, Tokyo, June 1995.
  12. M. Ohmi, T. Shiraishi, H. Taijiri, M. Haruna, presented at the 11th International Conference on Optical Fiber Sensors, Sapporo, Japan, May 1996.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited