Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Maskless photoencoded selective etching for glass-based microtechnology applications

Not Accessible

Your library or personal account may give you access

Abstract

Two-photon excitation of carriers in boron E′-center-containing borosilicate glasses results in a photoencoding of selectively etchable regions. Using a turbulent etching process followed by polishing, we have demonstrated a number of patterning capabilities for microtechnology applications such as ultrafast capillary electrophoresis chips and rapid prototyping of diffractive optical elements.

© 1996 Optical Society of America

Full Article  |  PDF Article
More Like This
Multiphoton micrometer-scale photoetching in silicate-based glasses

E. Sauvain, Jae H. Kyung, and N. M. Lawandy
Opt. Lett. 20(3) 243-245 (1995)

Interferometric study of poled glass under etching

W. Margulis and F. Laurell
Opt. Lett. 21(21) 1786-1788 (1996)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.