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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 21, Iss. 3 — Feb. 1, 1996
  • pp: 228–230

Grating interferometer for flatness testing

Peter J. de Groot  »View Author Affiliations


Optics Letters, Vol. 21, Issue 3, pp. 228-230 (1996)
http://dx.doi.org/10.1364/OL.21.000228


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Abstract

Two diffraction gratings placed in front of a flat surface generate an interference pattern representing the surface deformations. The interference pattern is achromatic and has an equivalent wavelength between 4 and 40 μm, depending on the grating frequencies and the viewing angle. Using phase-shifting techniques, the grating interferometer provides high-precision profile measurements of both smooth and rough surfaces.

© 1996 Optical Society of America

History
Original Manuscript: June 26, 1995
Published: February 1, 1996

Citation
Peter J. de Groot, "Grating interferometer for flatness testing," Opt. Lett. 21, 228-230 (1996)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-21-3-228

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