OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 21, Iss. 3 — Feb. 1, 1996
  • pp: 228–230

Grating interferometer for flatness testing

Peter J. de Groot  »View Author Affiliations


Optics Letters, Vol. 21, Issue 3, pp. 228-230 (1996)
http://dx.doi.org/10.1364/OL.21.000228


View Full Text Article

Enhanced HTML    Acrobat PDF (342 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Two diffraction gratings placed in front of a flat surface generate an interference pattern representing the surface deformations. The interference pattern is achromatic and has an equivalent wavelength between 4 and 40 μm, depending on the grating frequencies and the viewing angle. Using phase-shifting techniques, the grating interferometer provides high-precision profile measurements of both smooth and rough surfaces.

© 1996 Optical Society of America

History
Original Manuscript: June 26, 1995
Published: February 1, 1996

Citation
Peter J. de Groot, "Grating interferometer for flatness testing," Opt. Lett. 21, 228-230 (1996)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-21-3-228


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. C. Barus, Carnegie Inst. Washington Publ. 149, Pt. 1, Chap. 11 (1911).
  2. F.H. Smith, U.S. patent3,958,884 (April16, 1976).
  3. B. J. Chang, R. Alferness, E. N. Leith, Appl. Opt. 14, 1592 (1975). [CrossRef] [PubMed]
  4. J. E. Greivenkamp, J. H. Bruning, in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1992), Chap. 14.
  5. W. Jaerisch, G. Makosch, Appl. Opt. 12, 1552 (1973). [CrossRef] [PubMed]
  6. D. N. Yeskov, S. N. Koreshev, A. G. Seregin, Proc. SPIE 2340, 461 (1994). [CrossRef]
  7. P. M. Boone, P. Jacquot, Proc. SPIE 1554A, 512 (1991).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited