A new microfabrication technology for the design and realization of 1×<i>n</i> and <i>n</i>×<i>n</i> fiber-optic switches, <i>x</i>, <i>xy</i>, and <i>xyz</i> translational stages, optical scanners, fiber–fiber couplers, and fiber–planar-waveguide couplers is presented. This technology is based on bulk anisotropic etching and offers significant improvements over present micro-optical and microphotonic devices. With this new enabling technology we have fabricated 200-μm –2-cm translational stages for use in beam steering and fiber-optic switching applications. We present the fabrication and characterization of a 1×<i>n</i> micromechanical fiber-optic switch using this new technology. These nonoptimized devices have switching times of <10 ms with <-1-dB loss.
© 1997 Optical Society of America
C. González and S. D. Collins, "Magnetically actuated fiber-optic switch with micromachined positioning stages," Opt. Lett. 22, 709-711 (1997)