We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-µm-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-μm-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-μm-diameter ring and disk resonators to show the feasibility of such devices.
© 1997 Optical Society of America
D. Rafizadeh, J. P. Zhang, S. C. Hagness, A. Taflove, K. A. Stair, S. T. Ho, and R. C. Tiberio, "Waveguide-coupled AlGaAs / GaAs microcavity ring and disk resonators with high f inesse and 21.6-nm f ree spectral range," Opt. Lett. 22, 1244-1246 (1997)