OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 22, Iss. 23 — Dec. 1, 1997
  • pp: 1805–1807

Diffractive structures holographically recorded in amorphous hydrogenated carbon (a-C:H) films

Carlos R. A. Lima, Leandro L. Soares, Lucila Cescato, Marco A. R. Alves, and Edmundo S. Braga  »View Author Affiliations


Optics Letters, Vol. 22, Issue 23, pp. 1805-1807 (1997)
http://dx.doi.org/10.1364/OL.22.001805


View Full Text Article

Acrobat PDF (346 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We propose and demonstrate the direct recording of submicrometer relief gratings in amorphous hydrogenated carbon (a -C:H) films by reactive ion etching (RIE) for use as diffractive optical components. The high refractive index of this film and its transparency in the IR make such structures promising candidates for IR-transmission diffractive optical components. The structures are holographically recorded in photoresist and then transferred to a thin aluminum layer that is used as a mask for RIE of the a -C:H films. The diffraction measurements of the structures recorded in these films demonstrated the feasibility of using the materials as diffractive optical components.

© 1997 Optical Society of America

Citation
Carlos R. A. Lima, Leandro L. Soares, Lucila Cescato, Marco A. R. Alves, and Edmundo S. Braga, "Diffractive structures holographically recorded in amorphous hydrogenated carbon (a-C:H) films," Opt. Lett. 22, 1805-1807 (1997)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-22-23-1805


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. L. Holland and S. M. Ojha, Thin Solid Films 58, 107 (1976).
  2. J. C. Angus, P. Koidl, and S. Domitz, in Plasma Deposited Thin Films, J. Mort and F. Jansen, eds. (CRC, Boca Raton, Fla., 1986), p. 89.
  3. M. Kakuchi, M. Hikita, and T. Tamamura, Appl. Phys. Lett. 48, 835 (1986).
  4. K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschimidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
  5. R. Martino, R. Ferguson, A. Molless, L. Liebmann, M. Neisser, J. Weed, and S. Callegari, J. Vac. Sci. Technol. B 13, 2949 (1995).
  6. J. Frejlich, L. Cascato, and G. F. Mendes, Appl. Opt. 27, 1967 (1988).
  7. C. R. A. Lima and L. Cescato, Opt. Eng. 35, 2804 (1996).
  8. B. M. Assunção, F. da Costa, C. R. A. de Lima, and L. Cescato, Appl. Opt. 34, 597 (1995).
  9. R. Petit, Electromagnetic Theory of Gratings, Vol. 22 of Topics in Current Physics (Springer-Verlag, Berlin, 1980).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited