Surface-relief gratings were directly fabricated onto a glass surface by UV–visible laser irradiation. The glass surface was pretreated by molten salt, including Ag ions. Periodic intensity modulation of the laser light was conducted with a phase mask or by an interference technique. A pattern generated by intensity modulation was precisely transcribed onto the glass surface and a surface-relief grating was formed. The period and depth of the grating were 0.5 to 10 µm and less than 0.8 µm, respectively. The cross-sectional profile of the grating was sinusoidal or triangular, with very smooth surface morphology.
© 1997 Optical Society of America
Keiji Tsunetomo and Tadashi Koyama, "Direct formation of a surface-relief grating on glass by ultraviolet visible laser irradiation," Opt. Lett. 22, 411-413 (1997)