We describe a method and algorithm for reducing the sensitivity of phase-shifting interferometry to external vibrations. Using an interline-transfer camera, a shutter, and a fast phase shifter, we acquire a series of paired interferograms in quadrature, with the pairs spaced to maximize residual phase-error cancellation. The rapid acquisition of quadrature pairs significantly improves resistance of interferometry to low-frequency vibrations.
© 1998 Optical Society of America
Leslie L. Deck and Peter J. de Groot, "Punctuated quadrature phase-shifting interferometry," Opt. Lett. 23, 19-21 (1998)