Abstract
We describe a method and algorithm for reducing the sensitivity of phase-shifting
interferometry to external vibrations. Using an interline-transfer camera,
a shutter, and a fast phase shifter, we acquire a series of paired interferograms
in quadrature, with the pairs spaced to maximize residual phase-error cancellation.
The rapid acquisition of quadrature pairs significantly improves resistance
of interferometry to low-frequency vibrations.
© 1998 Optical Society of America
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