Abstract

We describe a method and algorithm for reducing the sensitivity of phase-shifting interferometry to external vibrations. Using an interline-transfer camera, a shutter, and a fast phase shifter, we acquire a series of paired interferograms in quadrature, with the pairs spaced to maximize residual phase-error cancellation. The rapid acquisition of quadrature pairs significantly improves resistance of interferometry to low-frequency vibrations.

© 1998 Optical Society of America

Phase shifting interferometry in the presence of vibration: a new algorithm and system

Peter L. Wizinowich
Appl. Opt. 29(22) 3271-3279 (1990)

Vibration in phase-shifting interferometry

Peter J. de Groot
J. Opt. Soc. Am. A 12(2) 354-365 (1995)

Vibration-resistant phase-shifting interferometry

Leslie Deck
Appl. Opt. 35(34) 6655-6662 (1996)

Suppression of phase errors from vibration in phase-shifting interferometry

J. M. Huntley
J. Opt. Soc. Am. A 15(8) 2233-2241 (1998)

Suppressing phase errors from vibration in phase-shifting interferometry

Leslie L. Deck
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