A comparison of absolute sphericity measurements with a ShackHartmann sensor and a TwymanGreen interferometer is presented. The absolute deviations of a test sphere from its ideal shape were calculated in both cases from the measured wave aberrations of three different positions. Very good qualitative and quantitative agreement of the results was achieved. The difference of the root-mean-square values of the two methods was 1/1000 of a wavelength.
© 1998 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(130.6010) Integrated optics : Sensors
J. Pfund, N. Lindlein, J. Schwider, R. Burow, Th. Blümel, and K.-E. Elssner, "Absolute sphericity measurement: a comparative study of the use of interferometry and a Shack–Hartmann sensor," Opt. Lett. 23, 742-744 (1998)