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Optics Letters

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  • Vol. 23, Iss. 10 — May. 15, 1998
  • pp: 742–744

Absolute sphericity measurement: a comparative study of the use of interferometry and a Shack–Hartmann sensor

J. Pfund, N. Lindlein, J. Schwider, R. Burow, Th. Blümel, and K.-E. Elssner  »View Author Affiliations


Optics Letters, Vol. 23, Issue 10, pp. 742-744 (1998)
http://dx.doi.org/10.1364/OL.23.000742


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Abstract

A comparison of absolute sphericity measurements with a ShackHartmann sensor and a TwymanGreen interferometer is presented. The absolute deviations of a test sphere from its ideal shape were calculated in both cases from the measured wave aberrations of three different positions. Very good qualitative and quantitative agreement of the results was achieved. The difference of the root-mean-square values of the two methods was 1/1000 of a wavelength.

© 1998 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(130.6010) Integrated optics : Sensors

Citation
J. Pfund, N. Lindlein, J. Schwider, R. Burow, Th. Blümel, and K.-E. Elssner, "Absolute sphericity measurement: a comparative study of the use of interferometry and a Shack–Hartmann sensor," Opt. Lett. 23, 742-744 (1998)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-23-10-742


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References

  1. A. E. Jensen, J. Opt. Soc. Am. 63, 1313(A) (1973).
  2. G. Schulz and J. Schwider, in Progress in Optics XIII, E. Wolf, ed. (North-Holland, Amsterdam, 1976), pp. 92167.
  3. I. Ghozeil, in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978), pp. 323349.
  4. K.-E. Elssner, R. Burow, J. Grzanna, and R. Spolaczyk, Appl. Opt. 28, 4649 (1989).
  5. G. Schulz, Feingerätetechnik 26, 488 (1977).

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