The stable setup of a confocal arrangement consisting of a combination of a refractive microlens and a pinhole array is presented. The focal plane of the microlenses lies at the rear surface of the substrate in the pinhole plane. By using a microscope objective one can image the stop array onto the object at a reduced size. Surface profiles of refractive and diffractive optical elements were measured with the help of this confocal microscope.
© 1998 Optical Society of America
(170.1790) Medical optics and biotechnology : Confocal microscopy
(180.0180) Microscopy : Microscopy
(180.1790) Microscopy : Confocal microscopy
(350.3950) Other areas of optics : Micro-optics
M. Eisner, N. Lindlein, and J. Schwider, "Confocal microscopy with a refractive microlens-pinhole array," Opt. Lett. 23, 748-749 (1998)