Sc–Si multilayers are suggested as high-reflectivity coatings for a VUV interval of 35–50 nm. Fabricated mirrors show normal-incidence reflectivity of 30–54%, which is high enough for effective manipulation of the beams of compact-discharge, laser-driven x-ray lasers. The values obtained are not, however, limits for Sc–Si coatings. Theoretical estimations as well as electron microscopy studies of Sc–Si interfaces indicate a large potential for a further increase in their reflectivity.
© 1998 Optical Society of America
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(230.4040) Optical devices : Mirrors
(230.4110) Optical devices : Modulators
(340.0340) X-ray optics : X-ray optics
Yu.A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A. I. Fedorenko, V. V. Kondratenko, Yu.P. Pershin, E. N. Zubarev, and V. Yu. Fedotov, "High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35-50nm," Opt. Lett. 23, 771-773 (1998)