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Optics Letters

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  • Vol. 23, Iss. 10 — May. 15, 1998
  • pp: 771–773

High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35-50nm

Yu.A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A. I. Fedorenko, V. V. Kondratenko, Yu.P. Pershin, E. N. Zubarev, and V. Yu. Fedotov  »View Author Affiliations


Optics Letters, Vol. 23, Issue 10, pp. 771-773 (1998)
http://dx.doi.org/10.1364/OL.23.000771


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Abstract

Sc–Si multilayers are suggested as high-reflectivity coatings for a VUV interval of 35–50 nm. Fabricated mirrors show normal-incidence reflectivity of 30–54%, which is high enough for effective manipulation of the beams of compact-discharge, laser-driven x-ray lasers. The values obtained are not, however, limits for Sc–Si coatings. Theoretical estimations as well as electron microscopy studies of Sc–Si interfaces indicate a large potential for a further increase in their reflectivity.

© 1998 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(230.4040) Optical devices : Mirrors
(230.4110) Optical devices : Modulators
(340.0340) X-ray optics : X-ray optics

Citation
Yu.A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A. I. Fedorenko, V. V. Kondratenko, Yu.P. Pershin, E. N. Zubarev, and V. Yu. Fedotov, "High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35-50nm," Opt. Lett. 23, 771-773 (1998)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-23-10-771


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