A hollow waveguide consisting of a glass tube with a thin aluminum film on the inner surface is proposed for delivery of excimer-laser light. The waveguide, fabricated by a chemical-vapor-deposition method, shows low losses for KrF excimer laser light: the straight loss of a 1-mm-bore waveguide was 0.4 dB:m.
© 1998 Optical Society of America
Yuji Matsuura and Mitsunobu Miyagi, "Flexible hollow waveguides for delivery of excimer-laser light," Opt. Lett. 23, 1226-1228 (1998)