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Optics Letters

Optics Letters


  • Vol. 23, Iss. 15 — Aug. 1, 1998
  • pp: 1226–1228

Flexible hollow waveguides for delivery of excimer-laser light

Yuji Matsuura and Mitsunobu Miyagi  »View Author Affiliations

Optics Letters, Vol. 23, Issue 15, pp. 1226-1228 (1998)

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A hollow waveguide consisting of a glass tube with a thin aluminum film on the inner surface is proposed for delivery of excimer-laser light. The waveguide, fabricated by a chemical-vapor-deposition method, shows low losses for KrF excimer laser light: the straight loss of a 1-mm-bore waveguide was 0.4 dB:m.

© 1998 Optical Society of America

OCIS Codes
(140.2180) Lasers and laser optics : Excimer lasers
(230.7370) Optical devices : Waveguides
(310.0310) Thin films : Thin films

Yuji Matsuura and Mitsunobu Miyagi, "Flexible hollow waveguides for delivery of excimer-laser light," Opt. Lett. 23, 1226-1228 (1998)

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