OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 23, Iss. 15 — Aug. 1, 1998
  • pp: 1226–1228

Flexible hollow waveguides for delivery of excimer-laser light

Yuji Matsuura and Mitsunobu Miyagi  »View Author Affiliations


Optics Letters, Vol. 23, Issue 15, pp. 1226-1228 (1998)
http://dx.doi.org/10.1364/OL.23.001226


View Full Text Article

Acrobat PDF (232 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A hollow waveguide consisting of a glass tube with a thin aluminum film on the inner surface is proposed for delivery of excimer-laser light. The waveguide, fabricated by a chemical-vapor-deposition method, shows low losses for KrF excimer laser light: the straight loss of a 1-mm-bore waveguide was 0.4 dB:m.

© 1998 Optical Society of America

OCIS Codes
(140.2180) Lasers and laser optics : Excimer lasers
(230.7370) Optical devices : Waveguides
(310.0310) Thin films : Thin films

Citation
Yuji Matsuura and Mitsunobu Miyagi, "Flexible hollow waveguides for delivery of excimer-laser light," Opt. Lett. 23, 1226-1228 (1998)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-23-15-1226


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. P. Karlitschek, K.-F. Klein, G. Hillrichs, and U. Grzesik, Proc. SPIE 2677, 127 (1996).
  2. T. Toriya, K. Kaneda, T. Tsumanuma, and K. Sanada, Proc. SPIE 2396, 138 (1995).
  3. R. S. Taylor, K. E. Leopold, R. K. Brimacombe, and S. Mihailov, Appl. Opt. 27, 3124 (1988).
  4. R. K. Brimacombe, R. S. Taylor, and K. E. Leopold, J. Appl. Phys. 66, 4035 (1989).
  5. K.-F Klein, G. Hillrichs, P. Karlitschek, and K. Mann, Proc. SPIE 2966, 564 (1997).
  6. Y. Hashishin, H. Nakano, H. Tanaka, and U. Kubo, Proc. SPIE 2966, 105 (1997).
  7. T. Kodas and M. Hampden-Smith, eds., The Chemistry of Metal CVD (VCH, Deerfield Beach, Fla., 1994).
  8. M. G. Simmonds, E. C. Phillips, J.-W. Hwang, and W. L. Gladfelter, Chemtronics 5, 155 (1991).
  9. W. L. Gladfelter, D. C. Boyd, and K. F. Jensen, Chem. Mater. 1, 339 (1989).
  10. M. Osawa, Y. Kato, T. Watanabe, M. Miyagi, S. Abe, M. Aizawa, and S. Onodera, Opt. Laser Technol. 27, 393 (1995).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited