OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 23, Iss. 15 — Aug. 1, 1998
  • pp: 1226–1228

Flexible hollow waveguides for delivery of excimer-laser light

Yuji Matsuura and Mitsunobu Miyagi  »View Author Affiliations


Optics Letters, Vol. 23, Issue 15, pp. 1226-1228 (1998)
http://dx.doi.org/10.1364/OL.23.001226


View Full Text Article

Acrobat PDF (232 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A hollow waveguide consisting of a glass tube with a thin aluminum film on the inner surface is proposed for delivery of excimer-laser light. The waveguide, fabricated by a chemical-vapor-deposition method, shows low losses for KrF excimer laser light: the straight loss of a 1-mm-bore waveguide was 0.4 dB:m.

© 1998 Optical Society of America

OCIS Codes
(140.2180) Lasers and laser optics : Excimer lasers
(230.7370) Optical devices : Waveguides
(310.0310) Thin films : Thin films

Citation
Yuji Matsuura and Mitsunobu Miyagi, "Flexible hollow waveguides for delivery of excimer-laser light," Opt. Lett. 23, 1226-1228 (1998)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-23-15-1226

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited