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Optics Letters

Optics Letters


  • Vol. 23, Iss. 19 — Oct. 1, 1998
  • pp: 1532–1534

Mechano-optical waveguide on-off intensity modulator

G. J. Veldhuis, C. Gui, T. Nauta, T. M. Koster, J. W. Berenschot, P. V. Lambeck, J. G. E. Gardeniers, and M. Elwenspoek  »View Author Affiliations

Optics Letters, Vol. 23, Issue 19, pp. 1532-1534 (1998)

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High-extinction on–off modulators are essential for channel selection in integrated-optical sensor arrays. We report a standard SiON-technology-based electrostatically driven integrated mechano-optical waveguide on–off intensity modulator. On–off modulation is achieved by movement of an absorbing element into and out of the evanescent field of the guided mode. An extinction ratio of >37 dB at an actuation voltage of <30 V was achieved in a 6 mm×4 mm device for a wavelength of 632.8 nm. Full wafer-scale fabrication is made possible by use of chemical mechanical polishing and aligned wafer bonding.

© 1998 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(250.7360) Optoelectronics : Waveguide modulators

G. J. Veldhuis, C. Gui, T. Nauta, T. M. Koster, J. W. Berenschot, P. V. Lambeck, J. G. E. Gardeniers, and M. Elwenspoek, "Mechano-optical waveguide on-off intensity modulator," Opt. Lett. 23, 1532-1534 (1998)

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