We have observed intense extreme-ultraviolet emission, within the 10–16-nm-wavelength range, emitted by a xenon capillary discharge plasma. Within a 0.3-nm bandwidth centered at 13.5 nm the axial emission intensity was comparable with that from the brightest laser-produced plasma sources, and a similar intensity was measured at approximately 11.3 nm. This source could thus be suitable for extreme-ultraviolet imaging applications, such as extreme-ultraviolet lithography.
© 1998 Optical Society of America
M. A. Klosner and W. T. Silfvast, "Intense xenon capillary discharge extreme-ultraviolet source in the 10–16-nm-wavelength region," Opt. Lett. 23, 1609-1611 (1998)