We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ~40 deg . The device is made from a multilayer (SiO<sub>2</sub> /Si<sub>3</sub>N<sub>4</sub>) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm . The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.
© 1998 Optical Society of America
(050.1380) Diffraction and gratings : Binary optics
(230.1360) Optical devices : Beam splitters
(230.1950) Optical devices : Diffraction gratings
(230.5440) Optical devices : Polarization-selective devices
A. G. Lopez and H. G. Craighead, "Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating," Opt. Lett. 23, 1627-1629 (1998)