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Optics Letters

Optics Letters


  • Vol. 23, Iss. 20 — Oct. 15, 1998
  • pp: 1627–1629

Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

A. G. Lopez and H. G. Craighead  »View Author Affiliations

Optics Letters, Vol. 23, Issue 20, pp. 1627-1629 (1998)

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We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ~40 deg . The device is made from a multilayer (SiO2 /Si3N4) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm . The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.

© 1998 Optical Society of America

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(230.1360) Optical devices : Beam splitters
(230.1950) Optical devices : Diffraction gratings
(230.5440) Optical devices : Polarization-selective devices

A. G. Lopez and H. G. Craighead, "Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating," Opt. Lett. 23, 1627-1629 (1998)

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