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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 23, Iss. 22 — Nov. 15, 1998
  • pp: 1772–1774

Topometry for locally changing materials

K. Leonhardt, U. Droste, and H. J. Tiziani  »View Author Affiliations


Optics Letters, Vol. 23, Issue 22, pp. 1772-1774 (1998)
http://dx.doi.org/10.1364/OL.23.001772


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Abstract

Three-dimensional topometry is supplemented with ellipsometric measurements on the same pixel raster for calculation of the phase of the reflected waves and correction of the height fields. Lateral resolution is <1μm . The ellipsometric angles are determined by phase shifting and contrast evaluation. Three-dimensional fields of the ellipsometric angles, the real and the imaginary parts of the refractive index, and the corrected topography of the heights are presented.

© 1998 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(160.4670) Materials : Optical materials
(170.6900) Medical optics and biotechnology : Three-dimensional microscopy

Citation
K. Leonhardt, U. Droste, and H. J. Tiziani, "Topometry for locally changing materials," Opt. Lett. 23, 1772-1774 (1998)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-23-22-1772

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