Abstract
Three-dimensional topometry is supplemented with ellipsometric measurements on the same pixel raster for calculation of the phase of the reflected waves and correction of the height fields. Lateral resolution is . The ellipsometric angles are determined by phase shifting and contrast evaluation. Three-dimensional fields of the ellipsometric angles, the real and the imaginary parts of the refractive index, and the corrected topography of the heights are presented.
© 1998 Optical Society of America
Full Article | PDF ArticleMore Like This
Ville Kettunen and Jari Turunen
Opt. Lett. 23(16) 1247-1249 (1998)
Gilbert D. Feke, Daniel P. Snow, Robert D. Grober, Peter J. de Groot, and Leslie Deck
Appl. Opt. 37(10) 1796-1802 (1998)
Tong Zhang and Ichirou Yamaguchi
Opt. Lett. 23(15) 1221-1223 (1998)