Three-dimensional topometry is supplemented with ellipsometric measurements on the same pixel raster for calculation of the phase of the reflected waves and correction of the height fields. Lateral resolution is <1μm . The ellipsometric angles are determined by phase shifting and contrast evaluation. Three-dimensional fields of the ellipsometric angles, the real and the imaginary parts of the refractive index, and the corrected topography of the heights are presented.
© 1998 Optical Society of America
(050.5080) Diffraction and gratings : Phase shift
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(160.4670) Materials : Optical materials
(170.6900) Medical optics and biotechnology : Three-dimensional microscopy
K. Leonhardt, U. Droste, and H. J. Tiziani, "Topometry for locally changing materials," Opt. Lett. 23, 1772-1774 (1998)