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Optics Letters

Optics Letters


  • Vol. 23, Iss. 22 — Nov. 15, 1998
  • pp: 1772–1774

Topometry for locally changing materials

K. Leonhardt, U. Droste, and H. J. Tiziani  »View Author Affiliations

Optics Letters, Vol. 23, Issue 22, pp. 1772-1774 (1998)

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Three-dimensional topometry is supplemented with ellipsometric measurements on the same pixel raster for calculation of the phase of the reflected waves and correction of the height fields. Lateral resolution is <1μm . The ellipsometric angles are determined by phase shifting and contrast evaluation. Three-dimensional fields of the ellipsometric angles, the real and the imaginary parts of the refractive index, and the corrected topography of the heights are presented.

© 1998 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(160.4670) Materials : Optical materials
(170.6900) Medical optics and biotechnology : Three-dimensional microscopy

K. Leonhardt, U. Droste, and H. J. Tiziani, "Topometry for locally changing materials," Opt. Lett. 23, 1772-1774 (1998)

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  1. K. Leonhardt, H.-J. Jordan, and H. J. Tiziani, Opt. Commun. 80, 205 (1991).
  2. C. W. See, M. G. Somekh, and R. D. Holmes, Appl. Opt. 35, 6663 (1996).
  3. G. D. Feke, D. P. Snow, R. D. Grober, P. J. de Groot, and L. Deck, Appl. Opt. 37, 1796 (1998).
  4. K. Leonhardt, U. Droste, and H. J. Tiziani, Appl. Opt. 33, 7477 (1994).
  5. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1992).
  6. M. Born and E. Wolf, Principles of Optics (Pergamon, Oxford, 1970).
  7. K. Leonhardt and H. J. Tiziani, “Optical topometry of surfaces with locally changing materials, layers, and contaminations,” J. Mod. Opt. (to be published).

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