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Optics Letters

Optics Letters


  • Vol. 23, Iss. 7 — Apr. 1, 1998
  • pp: 494–496

Detection of a small defect on a rough surface

Zu-Han Gu  »View Author Affiliations

Optics Letters, Vol. 23, Issue 7, pp. 494-496 (1998)

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We report experimental results that show that the far-field correlation function is sensitive to a small local change in rough-surface geometry, where the speckle spatial correlation rather than the sample ensemble average is adopted. The angular cross-correlation function of the far-field speckles scattered by one-dimensional random rough surfaces is measured when a polarized beam of light is incident upon the rough surface from vacuum, where one part of the surface used is a thin dielectric film deposited upon a glass substrate and the other part is identical to the first except for a localized defect. We envisage application of this sensitivity property to inspection of a sample with a defect by means of speckle mapping.

© 1998 Optical Society ofAmerica

OCIS Codes
(100.5010) Image processing : Pattern recognition
(240.6700) Optics at surfaces : Surfaces
(290.0290) Scattering : Scattering

Zu-Han Gu, "Detection of a small defect on a rough surface," Opt. Lett. 23, 494-496 (1998)

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