The design, fabrication, and initial characterization of a miniature single-pass Fourier-transform spectrometer (FTS) that has an optical bench that measures 1 cm×5 cm×10 cm is presented. The FTS is predicated on the classic Michelson interferometer design with a moving mirror. Precision translation of the mirror is accomplished by microfabrication of dovetailed bearing surfaces along single-crystal planes in silicon. Although it is miniaturized, the FTS maintains a relatively high spectral resolution, 0.1 cm<sup>-1</sup> , with adequate optical throughput.
© 1999 Optical Society of America
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4830) Optical design and fabrication : Systems design
(300.6190) Spectroscopy : Spectrometers
(300.6300) Spectroscopy : Spectroscopy, Fourier transforms
S. D. Collins, R. L. Smith, C. González, K. P. Stewart, J. G. Hagopian, and J. M. Sirota, "Fourier-transform optical microsystems," Opt. Lett. 24, 844-846 (1999)