Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Polarized light-scattering measurements of dielectric spheres upon a silicon surface

Not Accessible

Your library or personal account may give you access

Abstract

The polarization of light scattered into directions out of the plane of incidence by polystyrene latex spheres upon a silicon substrate was measured for p-polarized incident light. The experimental data show good agreement with theoretical predictions for three sizes of spheres. These results demonstrate that the polarization of light scattered by particles can be used to determine the size of particulate contaminants on silicon wafers. Theoretical models, based on successive degrees of approximation, indicate that the mean distance of a particle from the surface is the primary determinant of the scattered light polarization for small out-of-plane scattering angles.

© 1999 Optical Society of America

Full Article  |  PDF Article
More Like This
Polarized light scattering by dielectric and metallic spheres on silicon wafers

Jung Hyeun Kim, Sheryl H. Ehrman, George W. Mulholland, and Thomas A. Germer
Appl. Opt. 41(25) 5405-5412 (2002)

Polarized light scattering by dielectric and metallic spheres on oxidized silicon surfaces

Jung Hyeun Kim, Sheryl H. Ehrman, George W. Mulholland, and Thomas A. Germer
Appl. Opt. 43(3) 585-591 (2004)

Polarization of light scattered by microrough surfaces and subsurface defects

Thomas A. Germer and Clara C. Asmail
J. Opt. Soc. Am. A 16(6) 1326-1332 (1999)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved