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Optics Letters

Optics Letters


  • Vol. 24, Iss. 23 — Dec. 1, 1999
  • pp: 1702–1704

Measurement of trench depth by infrared interferometry

T. van Kessel and H. K. Wickramasinghe  »View Author Affiliations

Optics Letters, Vol. 24, Issue 23, pp. 1702-1704 (1999)

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Measurement and control of high-aspect-ratio structures such as dynamic random-access memory trenches is an important step in the manufacture of modern memory devices. We present a novel technique based on infrared interferometry that has been implemented in manufacturing and is capable of measuring sub- 0.25-μm -wide and 10-μm -deep trenches nondestructively and with an accuracy of better than 0.1μm .

© 1999 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing

T. van Kessel and H. K. Wickramasinghe, "Measurement of trench depth by infrared interferometry," Opt. Lett. 24, 1702-1704 (1999)

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  1. G. S. Kino, J. Vac. Sci. Technol. B 8, 1652 (1990).
  2. F. C. Chang, G. S. Kino, W. R. Studenmund, S. S. C. Chim, and C.-H. Chou, Proc. SPIE 1926, 464 (1993).
  3. T. R. Corle and G. S. Kino, Confocal Scanning Optical Microscopy and Related Techniques (Academic, San Diego, Calif., 1996).
  4. F. C. Chang and G. S. Kino, Appl. Opt. 37, 3471 (1998).
  5. N. Balasubramanian, “Optical system for surface topography measurement,” U.S. patent 4,340,306 (July 20, 1982).
  6. P. de Groot and L. Deck, Opt. Lett. 18, 1462 (1993).
  7. H. K. Wickramasinghe, “Method for measuring a trench depth parameter of a material,” U.S. patent 5,392,118 (February 21, 1995).

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