OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 24, Iss. 23 — Dec. 1, 1999
  • pp: 1705–1707

Miniaturized time-scanning Fourier transform spectrometer based on silicon technology

Omar Manzardo, Hans Peter Herzig, Cornel R. Marxer, and Nico F. de Rooij  »View Author Affiliations


Optics Letters, Vol. 24, Issue 23, pp. 1705-1707 (1999)
http://dx.doi.org/10.1364/OL.24.001705


View Full Text Article

Acrobat PDF (292 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of ±0.5 μm for a displacement of 38.5 μm . A method is presented to correct the spectrum to get rid of the nonlinearity. The driving reproducibility is ±25 nm. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm.

© 1999 Optical Society of America

OCIS Codes
(300.6300) Spectroscopy : Spectroscopy, Fourier transforms

Citation
Omar Manzardo, Hans Peter Herzig, Cornel R. Marxer, and Nico F. de Rooij, "Miniaturized time-scanning Fourier transform spectrometer based on silicon technology," Opt. Lett. 24, 1705-1707 (1999)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-24-23-1705

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited