We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of ±0.5 μm for a displacement of 38.5 μm . A method is presented to correct the spectrum to get rid of the nonlinearity. The driving reproducibility is ±25 nm. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm.
© 1999 Optical Society of America
(300.6300) Spectroscopy : Spectroscopy, Fourier transforms
Omar Manzardo, Hans Peter Herzig, Cornel R. Marxer, and Nico F. de Rooij, "Miniaturized time-scanning Fourier transform spectrometer based on silicon technology," Opt. Lett. 24, 1705-1707 (1999)