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Optics Letters

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  • Vol. 24, Iss. 23 — Dec. 1, 1999
  • pp: 1705–1707

Miniaturized time-scanning Fourier transform spectrometer based on silicon technology

Omar Manzardo, Hans Peter Herzig, Cornel R. Marxer, and Nico F. de Rooij  »View Author Affiliations


Optics Letters, Vol. 24, Issue 23, pp. 1705-1707 (1999)
http://dx.doi.org/10.1364/OL.24.001705


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Abstract

We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of ±0.5 μm for a displacement of 38.5 μm . A method is presented to correct the spectrum to get rid of the nonlinearity. The driving reproducibility is ±25 nm. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm.

© 1999 Optical Society of America

OCIS Codes
(300.6300) Spectroscopy : Spectroscopy, Fourier transforms

Citation
Omar Manzardo, Hans Peter Herzig, Cornel R. Marxer, and Nico F. de Rooij, "Miniaturized time-scanning Fourier transform spectrometer based on silicon technology," Opt. Lett. 24, 1705-1707 (1999)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-24-23-1705


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References

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