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Optics Letters

Optics Letters

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  • Vol. 24, Iss. 23 — Dec. 1, 1999
  • pp: 1732–1734

Deconvolution of local surface response from topography in nanometer profilometry with a dual-scan method

Chao-Wei Tsai, Chau-Hwang Lee, and Jyhpyng Wang  »View Author Affiliations


Optics Letters, Vol. 24, Issue 23, pp. 1732-1734 (1999)
http://dx.doi.org/10.1364/OL.24.001732


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Abstract

In profilometric measurements, by scanning the sample twice with a fixed vertical offset, one can separate the signal that comes from surface heterogeneity from the topographic signal. Using differential confocal microscopy, a newly developed open-loop nanometer profilometric technique, we demonstrated this dual-scan method on composite samples and obtained 10-nm depth resolution. This technique can also be applied to other profilometric techniques such as atomic force microscopy and scanning tunneling microscopy.

© 1999 Optical Society of America

OCIS Codes
(100.1830) Image processing : Deconvolution
(100.2980) Image processing : Image enhancement
(100.3010) Image processing : Image reconstruction techniques
(180.1790) Microscopy : Confocal microscopy
(180.5810) Microscopy : Scanning microscopy

Citation
Chao-Wei Tsai, Chau-Hwang Lee, and Jyhpyng Wang, "Deconvolution of local surface response from topography in nanometer profilometry with a dual-scan method," Opt. Lett. 24, 1732-1734 (1999)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-24-23-1732


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References

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