In profilometric measurements, by scanning the sample twice with a fixed vertical offset, one can separate the signal that comes from surface heterogeneity from the topographic signal. Using differential confocal microscopy, a newly developed open-loop nanometer profilometric technique, we demonstrated this dual-scan method on composite samples and obtained 10-nm depth resolution. This technique can also be applied to other profilometric techniques such as atomic force microscopy and scanning tunneling microscopy.
© 1999 Optical Society of America
(100.1830) Image processing : Deconvolution
(100.2980) Image processing : Image enhancement
(100.3010) Image processing : Image reconstruction techniques
(180.1790) Microscopy : Confocal microscopy
(180.5810) Microscopy : Scanning microscopy
Chao-Wei Tsai, Chau-Hwang Lee, and Jyhpyng Wang, "Deconvolution of local surface response from topography in nanometer profilometry with a dual-scan method," Opt. Lett. 24, 1732-1734 (1999)