We present a new application of digital holography for phase-contrast imaging and optical metrology. This holographic imaging technique uses a CCD camera for recording of a digital Fresnel off-axis hologram and a numerical method for hologram reconstruction. The method simultaneously provides an amplitude-contrast image and a quantitative phase-contrast image. An application to surface profilometry is presented and shows excellent agreement with contact-stylus probe measurements.
© 1999 Optical Society of America
(040.1520) Detectors : CCD, charge-coupled device
(090.0090) Holography : Holography
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(150.6910) Machine vision : Three-dimensional sensing
Etienne Cuche, Frédéric Bevilacqua, and Christian Depeursinge, "Digital holography for quantitative phase-contrast imaging," Opt. Lett. 24, 291-293 (1999)