OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 24, Iss. 5 — Mar. 1, 1999
  • pp: 294–296

Phase-shifting polarization interferometry for microstructure linewidth measurement

M. Totzeck and H. J. Tiziani  »View Author Affiliations


Optics Letters, Vol. 24, Issue 5, pp. 294-296 (1999)
http://dx.doi.org/10.1364/OL.24.000294


View Full Text Article

Acrobat PDF (1424 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We report on a novel procedure to measure the linewidth of steep microstructures, based on the polarization anisotropy caused by the structure edges. A liquid-crystal phase shifter and a polarizer are introduced into the imaging optics of a reflection-mode microscope. We apply the principle of phase-shifting interferometry to measure the phase and contrast of a TM-polarized image with the TE-polarized image as reference. The method provides selective edge detection because the polarization difference is localized at the structure edges.

© 1999 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(180.0180) Microscopy : Microscopy
(230.3720) Optical devices : Liquid-crystal devices

Citation
M. Totzeck and H. J. Tiziani, "Phase-shifting polarization interferometry for microstructure linewidth measurement," Opt. Lett. 24, 294-296 (1999)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-24-5-294

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited