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Optics Letters

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  • Vol. 24, Iss. 5 — Mar. 1, 1999
  • pp: 309–311

Real-time reflectivity and topography imagery of depth-resolved microscopic surfaces

A. Dubois, A. C. Boccara, and M. Lebec  »View Author Affiliations


Optics Letters, Vol. 24, Issue 5, pp. 309-311 (1999)
http://dx.doi.org/10.1364/OL.24.000309


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Abstract

We have constructed an interference microscope that produces, in real time, reflectivity and topography images of surfaces with depth discrimination better than 1>mu;m . Intensity and phase images are obtained at the rate of 50 per second by use of a multiplexed lock-in detection and MMX assembler-optimized calculation routines. With a wavelength of 0.84µm , depth discrimination of 0.7µm and lateral resolution of 0.3µm were demonstrated, in good agreement with theory. Two-dimensional cross-sectional reflectivity and topography images taken at different depths in an integrated circuit are presented.

© 1999 Optical Society of America

OCIS Codes
(100.0100) Image processing : Image processing
(100.3010) Image processing : Image reconstruction techniques
(170.6900) Medical optics and biotechnology : Three-dimensional microscopy
(170.6920) Medical optics and biotechnology : Time-resolved imaging
(180.0180) Microscopy : Microscopy
(180.3170) Microscopy : Interference microscopy

Citation
A. Dubois, A. C. Boccara, and M. Lebec, "Real-time reflectivity and topography imagery of depth-resolved microscopic surfaces," Opt. Lett. 24, 309-311 (1999)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-24-5-309


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References

  1. T. Wilson and C. J. R. Sheppard, Theory and Practice of Scanning Optical Microscopy (Academic, New York, 1984).
  2. M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, Proc. SPIE 775, 233 (1987).
  3. G. S. Kino and S. C. Chim, Appl. Opt. 29, 3775 (1990).
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  5. E. Beaurepaire, A. C. Boccara, M. Lebec, L. Blanchot, and H. Saint-Jalmes, Opt. Lett. 23, 244 (1998).
  6. C. J. R. Sheppard and T. Wilson, Appl. Phys. Lett. 38, 858 (1981).

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