Real-time reflectivity and topography imagery of depth-resolved microscopic surfaces
Optics Letters, Vol. 24, Issue 5, pp. 309-311 (1999)
http://dx.doi.org/10.1364/OL.24.000309
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Abstract
We have constructed an interference microscope that produces, in real time, reflectivity and topography images of surfaces with depth discrimination better than 1>mu;m . Intensity and phase images are obtained at the rate of 50 per second by use of a multiplexed lock-in detection and MMX assembler-optimized calculation routines. With a wavelength of 0.84µm , depth discrimination of 0.7µm and lateral resolution of 0.3µm were demonstrated, in good agreement with theory. Two-dimensional cross-sectional reflectivity and topography images taken at different depths in an integrated circuit are presented.
© 1999 Optical Society of America
[Optical Society of America ]
OCIS Codes
(100.0100) Image processing : Image processing
(100.3010) Image processing : Image reconstruction techniques
(170.6900) Medical optics and biotechnology : Three-dimensional microscopy
(170.6920) Medical optics and biotechnology : Time-resolved imaging
(180.0180) Microscopy : Microscopy
(180.3170) Microscopy : Interference microscopy
Citation
A. Dubois, A. C. Boccara, and M. Lebec, "Real-time reflectivity and topography imagery of depth-resolved microscopic surfaces," Opt. Lett. 24, 309-311 (1999)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-24-5-309
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