We report a means of fabricating hydrophilic domains in a hydrophobic background by lithographically patterning an adhesive hydrophobic layer. Polymer microlenses were fabricated on these substrates by use of a dip-coating technique. Various lens shapes (circular, elliptical, square) were fabricated on a variety of substrates (SiO<sub>2</sub>, SiN, GaAs, InP, etc.), ranging in size from 2 to 500 µm in diameter, with fill factors of up to 90%. Plano–convex and double-convex lenses were fabricated, with f-numbers as low as 1.38 and 1.2, respectively. Optimum lens surfaces deviated from spherical by just ±5 nm . The lenses are stable at room temperature and exhibit minimal degradation after 24 h at 105 °C. The transfer of these polymer lenses to an underlying substrate was also demonstrated.
© 2000 Optical Society of America
Daniel M. Hartmann, Osman Kibar, and Sadik C. Esener, "Characterization of a polymer microlens fabricated by use of the hydrophobic effect," Opt. Lett. 25, 975-977 (2000)