We describe a high-speed digital speckle pattern interferometer incorporating a line-scan camera and a waveguide phase modulator for the measurement of complex deformation (vibration phase and amplitude) at audio acoustic frequencies. Experimental data show continuous phase-stepped recovery of out-of-plane surface deformation in one dimension, obtained at 100 kHz with 2π/20-rad (0.02-μm) displacement resolution, for surface velocities of 3.2 mm s><sup>-1</sup> .
© 2000 Optical Society of America
(060.2310) Fiber optics and optical communications : Fiber optics
(120.6160) Instrumentation, measurement, and metrology : Speckle interferometry
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis
James M. Kilpatrick, Andrew J. Moore, James S. Barton, Julian D. C. Jones, Mark Reeves, and Clive Buckberry, "Measurement of complex surface deformation by high-speed dynamic phase-stepped digital speckle pattern interferometry," Opt. Lett. 25, 1068-1070 (2000)