A low-coherence reflectometer based on a conventional Michelson interferometer and a novel silicon detector chip that allows parallel heterodyne detection is presented. Cross-sectional images of 64×256 pixels covering an area of 1.92 mm × 1.3 mm are acquired at video rate and with a sensitivity close to the shot-noise limit. Applications in surface profiling and thickness measurement are demonstrated.
© 2000 Optical Society of America
S. Bourquin, V. Monterosso, P. Seitz, and R. P. Salathé, "Video-rate optical low-coherence reflectometry based on a linear smart detector array," Opt. Lett. 25, 102-104 (2000)