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Optics Letters

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  • Vol. 25, Iss. 20 — Oct. 15, 2000
  • pp: 1505–1507

Interference microscopy for three-dimensional imaging with wavelength-to-depth encoding

Guoqiang Li, Pang-Chen Sun, Paul C. Lin, and Yeshayahu Fainman  »View Author Affiliations


Optics Letters, Vol. 25, Issue 20, pp. 1505-1507 (2000)
http://dx.doi.org/10.1364/OL.25.001505


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Abstract

A novel interference microscope for three-dimensional (3D) imaging based on a wavelength-to-depth encoding technique is presented. Wavelength-to-depth encoding is realized by use of a diffractive lens and wavelength tuning. A high depth resolution of 0.71 μm is obtained with 0.90-N.A. objective lenses. Experimental measurements of a four-level grating are presented, and the results are found to be comparable with those obtained with a Dektak profilometer and a similar interference microscope that uses mechanical depth scanning. The system is promising for fast, noncontact, high-resolution 3D imaging.

© 2000 Optical Society of America

OCIS Codes
(110.6880) Imaging systems : Three-dimensional image acquisition
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(170.1650) Medical optics and biotechnology : Coherence imaging
(180.3170) Microscopy : Interference microscopy

Citation
Guoqiang Li, Pang-Chen Sun, Paul C. Lin, and Yeshayahu Fainman, "Interference microscopy for three-dimensional imaging with wavelength-to-depth encoding," Opt. Lett. 25, 1505-1507 (2000)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-25-20-1505


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