A novel interference microscope for three-dimensional (3D) imaging based on a wavelength-to-depth encoding technique is presented. Wavelength-to-depth encoding is realized by use of a diffractive lens and wavelength tuning. A high depth resolution of 0.71 μm is obtained with 0.90-N.A. objective lenses. Experimental measurements of a four-level grating are presented, and the results are found to be comparable with those obtained with a Dektak profilometer and a similar interference microscope that uses mechanical depth scanning. The system is promising for fast, noncontact, high-resolution 3D imaging.
© 2000 Optical Society of America
(110.6880) Imaging systems : Three-dimensional image acquisition
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(170.1650) Medical optics and biotechnology : Coherence imaging
(180.3170) Microscopy : Interference microscopy
Guoqiang Li, Pang-Chen Sun, Paul C. Lin, and Yeshayahu Fainman, "Interference microscopy for three-dimensional imaging with wavelength-to-depth encoding," Opt. Lett. 25, 1505-1507 (2000)