OSA's Digital Library

Optics Letters

Optics Letters


  • Vol. 25, Iss. 21 — Nov. 1, 2000
  • pp: 1573–1575

Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films

Joungchel Lee, Joohyun Koh, and R. W. Collins  »View Author Affiliations

Optics Letters, Vol. 25, Issue 21, pp. 1573-1575 (2000)

View Full Text Article

Acrobat PDF (116 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A multichannel ellipsometer in the dual-rotating-compensator configuration has been developed for potential applications in real-time Mueller matrix spectroscopy of anisotropic surfaces and films. This instrument provides spectra (1.7–5.3 eV) in all 16 elements of the unnormalized Mueller matrix M of a film–substrate system with a minimum overall data acquisition time of ta = 0.25 s. We have applied this instrument first for high-precision determination of spectra in M with ta = 2.5 s for a microscopically sculptured film.

© 2000 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(260.1180) Physical optics : Crystal optics
(260.2130) Physical optics : Ellipsometry and polarimetry
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties

Joungchel Lee, Joohyun Koh, and R. W. Collins, "Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films," Opt. Lett. 25, 1573-1575 (2000)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. R. W. Collins, Rev. Sci. Instrum. 61, 2029 (1990).
  2. R. W. Collins, D. E. Aspnes, and E. A. Irene, eds., Proceedings of the Second International Conference on Spectroscopic Ellipsometry (Elsevier, Amsterdam, 1998), also published as Thin Solid Films 313–314, (1998).
  3. G. K. T. Conn and G. K. Eaton, J. Opt. Soc. Am. 44, 546 (1954).
  4. Z. Sekera, J. Opt. Soc. Am. 47, 484 (1957).
  5. J. Lee, P. I. Rovira, I. An, and R. W. Collins, Rev. Sci. Instrum. 69, 1800 (1998).
  6. R. M. A. Azzam, Opt. Lett. 2, 148 (1978).
  7. D. H. Goldstein, Appl. Opt. 31, 6676 (1992).
  8. R. W. Collins and J. Koh, J. Opt. Soc. Am. A 16, 1997 (1999).
  9. P. I. Rovira, R. A. Yarussi, R. W. Collins, R. Messier, V. C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180 (1997).
  10. Low-cogging hollow shaft rotary motor system, Airex Corporation, Dover, N.H. 03820.
  11. PDA-1024 spectrometric detector, Princeton Instruments, Inc., Princeton, N.J. 08619.
  12. CP-140 imaging spectrograph, Instruments S. A., Inc., Edison, N.J. 08820.
  13. PMR8M-2° MgF2 polarizer, Halbo Optics, Chelmsford CM3 5ZA, UK.
  14. RZ-1/4–350-M MgF2 biplate compensator, Optics for Research, Caldwell, N.J. 07006.
  15. J. Gil and E. Bernabeu, Opt. Acta 32, 259 (1985).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited