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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 25, Iss. 21 — Nov. 1, 2000
  • pp: 1573–1575

Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films

Joungchel Lee, Joohyun Koh, and R. W. Collins  »View Author Affiliations


Optics Letters, Vol. 25, Issue 21, pp. 1573-1575 (2000)
http://dx.doi.org/10.1364/OL.25.001573


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Abstract

A multichannel ellipsometer in the dual-rotating-compensator configuration has been developed for potential applications in real-time Mueller matrix spectroscopy of anisotropic surfaces and films. This instrument provides spectra (1.7–5.3 eV) in all 16 elements of the unnormalized Mueller matrix M of a film–substrate system with a minimum overall data acquisition time of ta = 0.25 s. We have applied this instrument first for high-precision determination of spectra in M with ta = 2.5 s for a microscopically sculptured film.

© 2000 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(260.1180) Physical optics : Crystal optics
(260.2130) Physical optics : Ellipsometry and polarimetry
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties

Citation
Joungchel Lee, Joohyun Koh, and R. W. Collins, "Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films," Opt. Lett. 25, 1573-1575 (2000)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-25-21-1573

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