We designed, fabricated, and characterized a binary diffractive lens with features less than 60 nm. The lens was designed for operation in the red portion of the spectrum. Experimental measurements of lens performance agree with predictions generated by rigorous models of diffraction.
© 2000 Optical Society of America
(050.1960) Diffraction and gratings : Diffraction theory
(050.1970) Diffraction and gratings : Diffractive optics
(220.3630) Optical design and fabrication : Lenses
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
Joseph N. Mait, Axel Scherer, Oliver Dial, Dennis W. Prather, and Xiang Gao, "Diffractive lens fabricated with binary features less than 60 nm," Opt. Lett. 25, 381-383 (2000)