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Optics Letters

Optics Letters


  • Vol. 25, Iss. 7 — Apr. 1, 2000
  • pp: 454–456

Effects of object roughness on partially coherent image formation

Neil A. Beaudry and Tom D. Milster  »View Author Affiliations

Optics Letters, Vol. 25, Issue 7, pp. 454-456 (2000)

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Phase perturbations in the object plane of a partially coherent imaging system are found to produce artifacts in the aerial image. It is demonstrated that phase perturbations of as little as λ/30 rms can produce visible deformation in the final image for modest coherence factors, such as σc = 0.4. A combination of simulation and experiment is used to demonstrate the effects. Application to line-edge roughness in lithography is described.

© 2000 Optical Society of America

OCIS Codes
(030.5770) Coherence and statistical optics : Roughness
(110.4980) Imaging systems : Partial coherence in imaging
(110.5220) Imaging systems : Photolithography
(110.7440) Imaging systems : X-ray imaging
(180.7460) Microscopy : X-ray microscopy
(260.7200) Physical optics : Ultraviolet, extreme

Neil A. Beaudry and Tom D. Milster, "Effects of object roughness on partially coherent image formation," Opt. Lett. 25, 454-456 (2000)

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