Mass-transport smoothing has been used to reduce the surface roughness of a gallium phosphide (GaP) microlens from 50.0 nm (rms) to 6.5 nm (rms) while preserving the original surface figure. The initial GaP surface was fabricated by dry-etch transfer of a polymer microlens into a GaP substrate. This result demonstrates that mass transport can significantly improve the performance of economically feasible high-refractive-index micro-optical elements having arbitrary surface profiles.
© 2000 Optical Society of America
(160.6000) Materials : Semiconductor materials
(220.4000) Optical design and fabrication : Microstructure fabrication
(240.5770) Optics at surfaces : Roughness
(350.3950) Other areas of optics : Micro-optics
Todd A. Ballen, James R. Leger, Daniel E. Glumac, Lori S. Swanson, and Edward Gage, "Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses," Opt. Lett. 25, 515-517 (2000)