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Optics Letters

Optics Letters


  • Vol. 25, Iss. 8 — Apr. 15, 2000
  • pp: 548–550

Geometrical cross-sectional imaging by a heterodyne wavelength-scanning interference confocal microscope

Takashi Fukano and Ichirou Yamaguchi  »View Author Affiliations

Optics Letters, Vol. 25, Issue 8, pp. 548-550 (2000)

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We developed a heterodyne interference confocal microscope, using wavelength modulation of a laser diode to realize quick separate measurement of the refractive indices and geometrical thicknesses of multiple layers. This microscope requires only a single axial movement of the specimen. We can display the geometrical cross sections of the interfaces and the refractive indices of a three-layered object.

© 2000 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(170.6960) Medical optics and biotechnology : Tomography
(180.1790) Microscopy : Confocal microscopy

Takashi Fukano and Ichirou Yamaguchi, "Geometrical cross-sectional imaging by a heterodyne wavelength-scanning interference confocal microscope," Opt. Lett. 25, 548-550 (2000)

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