We developed a heterodyne interference confocal microscope, using wavelength modulation of a laser diode to realize quick separate measurement of the refractive indices and geometrical thicknesses of multiple layers. This microscope requires only a single axial movement of the specimen. We can display the geometrical cross sections of the interfaces and the refractive indices of a three-layered object.
© 2000 Optical Society of America
(040.2840) Detectors : Heterodyne
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(170.6960) Medical optics and biotechnology : Tomography
(180.1790) Microscopy : Confocal microscopy
Takashi Fukano and Ichirou Yamaguchi, "Geometrical cross-sectional imaging by a heterodyne wavelength-scanning interference confocal microscope," Opt. Lett. 25, 548-550 (2000)