OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 26, Iss. 10 — May. 15, 2001
  • pp: 716–718

Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems

Klaus B. Mogensen, Peter Friis, Jörg Hübner, Nickolaj Petersen, Anders M. Jørgensen, Pieter Telleman, and Jörg P. Kutter  »View Author Affiliations


Optics Letters, Vol. 26, Issue 10, pp. 716-718 (2001)
http://dx.doi.org/10.1364/OL.26.000716


View Full Text Article

Acrobat PDF (118 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The UV wavelength region is of great interest in absorption spectroscopy, which is employed for chemical analysis, since many organic compounds absorb in only this region. Germanium-doped silica, which is often preferred as the waveguide core material in optical devices for telecommunication, cannot accommodate guidance below 400 nm, owing to the presence of UV-absorbing centers. We show that silicon oxynitride (SiOx Ny) waveguides exhibit very good UV performance. The propagation loss for 24-µm -wide SiOxN y waveguides was found to be ~1.0dB/cm in the wavelength range 220–550 nm. The applicability of these waveguides was demonstrated in a biochemical microsystem consisting of multimode buried-channel SiOxN y waveguides that were monolithically integrated with microfluidic channels. Absorption measurements of a β -blocking agent, propranolol, at 212–215 nm were performed. The detection limit was reached at a concentration of 13µM , with an optical path length of 500µm (signal/noise ratio, 2).

© 2001 Optical Society of America

OCIS Codes
(170.3890) Medical optics and biotechnology : Medical optics instrumentation
(230.7380) Optical devices : Waveguides, channeled
(300.1030) Spectroscopy : Absorption
(300.6540) Spectroscopy : Spectroscopy, ultraviolet
(310.6860) Thin films : Thin films, optical properties

Citation
Klaus B. Mogensen, Peter Friis, Jörg Hübner, Nickolaj Petersen, Anders M. Jørgensen, Pieter Telleman, and Jörg P. Kutter, "Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems," Opt. Lett. 26, 716-718 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-10-716


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. S. C. Jakeway, A. J. de Mello, and E. L. Russel, Fresenius J. Anal. Chem. 366, 525 (2000).
  2. O. Leistiko and P. F. Jensen, J. Micromech. Microeng. 8, 148 (1998).
  3. J. M. Ruano, V. Benoit, J. S. Aitchison, and J. M. Cooper, Anal. Chem. 72, 1093 (2000).
  4. J. Hübner, K. B. Mogensen, A. M. Jørgensen, P. Friis, P. Telleman, and J. P. Kutter, Rev. Sci. Instrum. 72, 229 (2001).
  5. D. A. Skoog, D. M. West, and F. J. Holler, Fundamental of Analytical Chemistry, 7th ed. (Saunders, Philadelphia, Pa., 1997).
  6. A. V. Amossov and A. O. Rybaltovsky, J. Non-Cryst. Solids 179, 75 (1994).
  7. C. Ance, F. de Chelle, J. P. Ferraton, and G. Leveque, Appl. Phys. Lett. 60, 1399 (1992).
  8. K. E. Mattsson, J. Appl. Phys. 77, 6616 (1995).
  9. R. G. Hunsperger, Integrated Optics: Theory and Technology, Vol. 33 of Springer Series in Optical Sciences (Springer, New York, 1991).
  10. F. Landouceur and J. D. Love, Silica-Based Buried Channel Waveguides and Devices (Chapman & Hall, New York, 1996).
  11. F. Bruno, M. del Guidice, R. Recca, and F. Testa, Appl. Opt. 30, 4560 (1991).
  12. T. Warabisako, T. Uematsu, S. Muramatsu, K. Tsutsui, H. Ohtsuka, Y. Nagata, and M. Sakamoto, Sol. Energy Mater. Sol. Cells 48, 137 (1997).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited