The UV wavelength region is of great interest in absorption spectroscopy, which is employed for chemical analysis, since many organic compounds absorb in only this region. Germanium-doped silica, which is often preferred as the waveguide core material in optical devices for telecommunication, cannot accommodate guidance below 400 nm, owing to the presence of UV-absorbing centers. We show that silicon oxynitride (SiO_x N_y) waveguides exhibit very good UV performance. The propagation loss for 24-µm -wide SiO_xN _y waveguides was found to be ~1.0dB/cm in the wavelength range 220–550 nm. The applicability of these waveguides was demonstrated in a biochemical microsystem consisting of multimode buried-channel SiO_xN _y waveguides that were monolithically integrated with microfluidic channels. Absorption measurements of a β -blocking agent, propranolol, at 212–215 nm were performed. The detection limit was reached at a concentration of 13µM , with an optical path length of 500µm (signal/noise ratio, 2).

© 2001 Optical Society of America

[Optical Society of America ]

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