A silicon micromachined membrane deformable mirror with a diameter of 10 mm, reflectivity of better than 99.8%, and a surface deflection range of 3μm has been used for intracavity control of an industrial 200-W cw Nd:YAG laser. When it was placed in the resonator, the mirror demonstrated continuous (more than 40-h) stable operation under an ~550-W cw optical load, with beam diameters in the range 3–6 mm. Periodic modulation of the curvature of the deformable mirror with a frequency of 250 Hz produced quick switching between stable and unstable resonator configurations, which resulted in pulse-period Q -switched generation with average power in the range 50–200 W, modulation depth from 95% to 10%, and an M<sup>2</sup> parameter of 6.5 to 30.
© 2001 Optical Society of America
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(140.3300) Lasers and laser optics : Laser beam shaping
(140.3530) Lasers and laser optics : Lasers, neodymium
(140.3540) Lasers and laser optics : Lasers, Q-switched
(140.4780) Lasers and laser optics : Optical resonators
Gleb Vdovin and Vadim Kiyko, "Intracavity control of a 200-W continuous-wave Nd:YAG laser by a micromachined deformable mirror," Opt. Lett. 26, 798-800 (2001)